Product novelty 06. May 2024

The newly developed FLP Wafer 1300 - 1700 is a double-sided flat polishing machine for processing wafers and glass wafers. For the first time, chemically resistant granite polishing discs have been used. They guarantee a very high accuracy of the tool precision. The servo drives are infinitely variable. This new development enables processing of up to 12" wafers on both sides in the pre-polishing or final polishing process.


The advantages at a glance:
Granite construction
Automated slurry mixing system
Slurry recirculation
Slurry separation
DI water and nitrogen purification
Waste water separation
Automatic mould conditioning
Polishing cloth assembly
Freely programmable control system
Text-guided control
Monitoring of process parameters
Torque control
Intuitive programme support
Error analysis system
Work disc temperature control
Integrated thickness measurement